available for automatically calculating the critical dimensions of DVD bits. The software identifies the bits and then uses specialized algorithms for calculating the bit's dimensions. Tables and graphs of the dimensional distributions can be created.

FIGURE 7-15 A: DVD bits 11.7 x 11.7 u, B: CD R/W 23 x 23 u.

7.3.3 Advanced Optical

Optics play a critical role in many high technology products such as cameras, video recorders, and flat panel displays. The AFM can be very helpful for metrological measurements when optical profilers cannot be used because the specimen under study is transparent.

Micro-Optics

Micro-optical devices are often created from insulating material and cannot be viewed in an SEM/TEM. Further, because they are transparent, an optical profiler does not give accurate metrological measurements. The AFM however, is a mechanical imaging tool and does, in fact provide accurate metrological measurements on optically transparent materials.