Chapter 7
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| H: |
Measured |
| P: |
Measured |
| W1: |
Possible |
| W2: |
Difficult – special probes |
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FIGURE 7-13 Illustration of device structure. |
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Figure 7-14 illustrates the use of AFM for measuring the angles of a side wall in a trench. This trench is relatively large, and because the wall angle is less than the probe angle, the measurement is accurate. Measurement of smaller structures is dependent on the availability of probes with optimized geometries. |
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FIGURE 7-14 AFM measurements on a trench structure. |
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7.3.2 Data Storage |
Data storage requires creating structures with nanometer-sized dimensions. The AFM is utilized for product development of both magnetic and optical mass storage devices. Applications in the magnetic storage area include the visualization of magnetic bits, pole tip recession, and platter surface texture. |
Bits and tracks in DVD and CD-R/W storage media are visualized with an AFM. DVD bit metrology measurements can yield all of the critical dimensions of a bit as well as track dimensions. Specialized software is |
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