FIGURE 5-6 Line profile analysis of an AFM image of DVD bits. The height and width of the surface features are measured from the line profile.
5.3.2 Line / Area Roughness
The line and area roughness of can be easily calculated from an AFM image. Standard equations, see below, are typically used for these calculations.
When comparing the line or area roughness it important that the measurement is made on the appropriate length scale. Also, the values for line/area roughness depend on the length/size of the image, (see Figure 5-7).