Typically, a software interface is used for controlling the AFM stage.
Functions controlled by software include setting all movement of the XY
stage to locate the feature for scanning, probe approach to get the probe
near/on the surface, and setting scan parameters, display of images while
scanning, and a capability for measuring F/D curves. Figure 2-33 illustrates a
typical AFM scan control window. Below is a list of the functions found in the control software. |