Chapter 2
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Stage: An AFM stage is where the sample is placed when an image is
measured. Typically, the AFM stage includes an AFM scanner and an
optical microscope along with motion control systems for moving the
scanner relative to a sample in the X-Y-Z axis.
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An AFM may be constructed for laboratory use and easily fit on a table
top; it may also be constructed to accommodate large samples such as
semiconductor wafers. An AFM capable of holding wafers can be large
and have a volume of several cubic meters. Regardless of the size of the
AFM, they all have the similar components. Often the electronics are
separated from the stage because fans used to cool the electronics cause
unwanted vibrations in the stage the reduce the resolution of the AFM.
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2.1 Basic Concepts
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| There are three basic concepts that you must be familiar with to
understand the operation of an AFM. These are piezoelectric transducers,
force transducers, and feedback control. |
| Piezoelectric Transducers |
Piezoelectric materials are electromechanical transducers that convert electrical potential into mechanical motion. Piezoelectric materials are naturally occurring and may be crystalline, amorphous or even polymeric.When a potential is applied across two opposite sides of the piezoelectric, it changes geometry. The magnitude of the dimensional changes depends on the material, the geometry of the device, and the magnitude of the applied voltage. |
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FIGURE 2-2 A piezoelectric disc will expand radially when a voltage potential is applied to the top and bottom electrodes. The disc will change shape such that volume is preserved. |
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