Chapter 1
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SEM/TEM instruments are capable of doing much more than
topography measurements. For example, electron beam instrumentation
can do EDX measurements or even electron beam initiated lithography.
Likewise, the AFM can make many types of measurements other than
AFM topographical measurements. For example, AFM instruments can
make thermal, magnetic and electric fields maps of a surface. Like the
SEM/TEM, an AFM can also initiate lithographic changes on a surface.
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Although the time required for making a measurement with the SEM
image is typically less than an AFM, the amount of time required to
get meaningful images is similar. This is because the SEM/TEM often
requires substantial time to prepare a sample. With the AFM little and
often no sample preparation is required. Figure 1-9 shows the comparison
between a TEM image of nano-particles and the AFM image of the same
nanoparticles. |
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FIGURE 1-9 AFM image, color, and TEM, grayscale, of 500 nm diameter particles. A line profile from the AFM image shows the height of the particles. |
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FIGURE 1-10 Comparison of the time for measurements and instrumentation cost of optical, AFM, and SEM/TEM microscopes.
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In comparison with an optical microscope and the SEM/TEM an AFM is more difficult to use than the optical microscope and easier to use than the SEM/TEM. Figure 1-10 compares the relative time and cost for optical, AFM, and SEM/TEM microscopes. |
Lastly, an optical microscope requires the least amount of laboratory space, while the SEM/TEM requires the most amount of laboratory space. An AFM is in the middle of these two. |
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