Magnification of the vertical surface features of an object, those features
leaving the horizontal plane and extending in the vertical direction, have historically been measured by a stylus profiler. An example of an early profiler is shown in Figure 1-4. This profiler, invented by Schmalz1 in 1929, utilized an optical lever arm to monitor the motion of a sharp probe mounted at the end of a cantilever. A magnified profile of the surface was generated by recording the motion of the stylus on photographic paper. This type of “microscope” generated profile “images” with a magnification of greater than 1000X.
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