AFM University Introduction to Atomic Force Microscopy by Paul West

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« Chapter 1
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 « Chapter 4
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 « Chapter 6
 « Chapter 7
« Appendix A
« Appendix B
« Appendix C
« Appendix D
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Appendix B . Scanner Qualifi cations
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Y-Line Profile:
Z-range
Measure standard VLSI sample with known step size on a standard sample holder . Replace the sample holder with an inclined one. Position it with shorter side facing the positive x axis; scan for max available range. Save image, do NOT level it, extract line profile, and perform measurements, (see example). Variation in height represents Z-range.
 

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