AFM University Introduction to Atomic Force Microscopy by Paul West

« Cover
« Foreward
« Chapter 1
 « Chapter 2
 « Chapter 3
 « Chapter 4
 « Chapter 5
 « Chapter 6
 « Chapter 7
« Appendix A
« Appendix B
« Appendix C
« Appendix D
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Appendix B . Scanner Qualifi cations
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Sample holder: standard flat sample holder, sample holder with 7 degree tilt Software: NanoRule+, ExcelTM
Flat Sample Holder
7 Deg Sample Holder
XY Scan Range
Take a scan of the VLSI 3 micron pitch sample at max scan range with PID optimized. Save the image. Level it properly, extract the line profile along X&Y, and count the number of features over the range. It should be greater than 27.
Example: # of X-pitches = 28
  # of Y-pitches = 28
X-Line Profile:

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